Nexact Ceramic Motor Actuator

PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics

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AUBURN, Mass., Sept. 26, 2007 -- PI (Physik Instrumente) LP has introduced the N-310 Nexact miniature ceramic linear motor actuator for applications including laser tuning, nanotechnology, nanoimprinting, semiconductor and data storage test and production equipment, nanomanipulation and biotechnology.

Nexact is a patented, high-precision linear motor actuator developed to bridge the gap between micro- and nanopositioning devices. At .5 cubic inch and 50 g (1.7 oz), the Nexact actuator is significantly smaller and more cost effective than its big "brother," the high-force ceramic motor Nexline, PI said.

Nexact actuators provide piezo-class resolution (far below 1 nanometer) and millisecond responsiveness. The new technology combines virtually unlimited travel ranges with high stiffness in a very small package. In operation, piezoceramic bending elements act on the ceramic runner, connected to the moving part of the application.

The length of the runner can be chosen as required, force capacity, resolution and velocity depend on the piezo geometry and are also scalable. To move the runner over longer distances the stepping mode is used, whereas for distances smaller than 7 µm, the linear (sweep) mode enables high-dynamics positioning with resolutions below 1 nm. The special drive design reduces the operating voltage to 40 V and below, according to PI.

Features & Advantages:

Very Compact (25 x 25 x 12 mm) and Cost Effective
Nonmagnetic and Vacuum-Compatible Design, Self-Locking
10 N Push/Pull, 20 mm Travel, 10 mm/sec Speed
Picometer Resolution
Very Stiff Design, Millisecond Response and High Bandwidth

In contrast to servo or stepper motor actuators, the piezo stepping elements effect linear motion directly, without the need to transform rotation with gears and leadscrews. Backlash and wear are eliminated and the drive is maintenance-free. Nexact actuators exhibit high stiffness and are self-locking when powered down with nanometer position stability, and zero dissipation or servo-dither at rest.

For more information, visit: www.physikinstrumente.com/en/news/fullnews.php?newsid=123&NR; e-mail: [email protected]

PI (Physik Instrumente) LP
16 Albert St.
Auburn, MA 01501
Phone: (508) 832-3456
Fax: (508) 832-0506

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Published: September 2007