Oct 2007PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
The P-733.3CD three-axis nanopositioning/scanning stage launched by PI (Physik Instrumente) LP features travel ranges of 100 × 100 μm in the X and Y directions and 10 μm in the Z direction, and a 50 × 50-mm clear aperture for transmitted-light applications. Capacitive nanomeasuring sensors read the plat-form position directly and without physical contact, making them friction- and hysteresis-free and resulting in linearity of up to 99.99% with 0.1-nm resolution. The parallel metrology configuration measures all axes against the same fixed reference, providing better precision than that achieved by serial metrology. Applications include scanning microscopy, nanomanipulation, semiconductor testing, and mask and wafer positioning.