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PIEZO STAGE

Photonics Spectra
Jan 2008
Technobis GroupRequest Info
 
Technobis-Mechatronics-BV.jpgA piezo stage with a positioning range of 150 × 150 mm, ≤50-nm accuracy, <30-nm repeatability and 10-nm resolution has been introduced by Technobis Mechatronics BV. Comprising a lightweight X-Y table assembly, four high-precision guiding rails, two piezomotors with a controller and two noncontact linear encoders, the stage is suitable for use in laser marking systems, biotechnology, life sciences, inverted microscopes, micromachining, semiconductor test equipment and R&D applications.


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