MICROSCOPE
Veeco Instruments Inc.Request Info
Designed to meet critical dimension, depth, sidewall angle and chemical mechanical planarization metrology requirements for 45- and 32-nm-node semiconductor processes, the InSight 3DAFM atomic force microscope manufactured by Veeco Instruments Inc. performs high-resolution nondestructive 3-D measurements. It provides production-based reference metrology on crucial CD elements encountered in lithography and advanced etch processing, including gate, shallow trench isolation, dual-damascene structures and line-edge variation. The company says that, at a production rate of 30 wafers per hour, the device provides three times the throughput and twice the measurement accuracy and precision of its previous models. Features include preloaded tip cassettes for ease of use and coated probes for improved tip lifetime.
https://www.veeco.com
/Buyers_Guide/Veeco_Instruments_Inc/c15663
Published: February 2008
REQUEST INFO ABOUT THIS PRODUCT
* First Name:
* Last Name:
* Email Address:
* Company:
* Country:
Message:
When you click "Send Request", we will record and send your personal contact information to Veeco Instruments Inc. by email so they may respond directly. You also agree that Photonics Media may contact you with information related to this inquiry, and that you have read and accept our
Privacy Policy and
Terms and Conditions of Use.
Register or login to auto-populate this form:
Login
Register
* Required