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3-D OPTICAL SENSORS

Photonics Spectra
May 2008
PhaseViewRequest Info
 
PhaseView USA offers an OEM version of its noncontact 3-D MicroPhase and SurPhase smart sensor heads that can be integrated with an optical microscope or used as stand-alone units, both supplied with a comprehensive software development kit. Processing time for 1 million measurement points is <1 s, and lateral and axial resolution are 0.4 μm and 8 nm, respectively. Built-in proprietary digital phase technology provides ease of use, fast processing, accuracy and reliability. The 3-D sensors can be integrated easily into existing vision systems and quality control machines. Applications include roughness and bump measurements in the semiconductor and solar cell industries, and step heights and profile measurements in 3-D surface or form characterization for quality control of materials or optics.


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