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LIGHT SOURCE

Photonics Spectra
May 2008
Energetiq Technology Inc.Request Info
 
Energetiq.jpgThe EQ-1000 is a compact high-brightness light product that incorporates the LDLS laser-driven light source. It can be configured for broad-spectrum output in spectroscopy, biological imaging and general scientific research, or for specific narrowband spectral output such as 193 nm for photoresist testing. Manufactured by Energetiq Technology Inc., a single source covers the range from 170 nm to beyond the visible. It uses a CW laser to directly heat a xenon plasma to the high temperatures required for efficient deep-UV production. The power output is >1.5 mW/nm, collected through a 1-mm aperture from 180 to 800 nm.


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