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Q-Switched Solid-State Laser Delivers UV Light

Jul 2008
Xiton Photonics GmbHRequest Info
• 213-nm wavelength
• 0.1- to 30-kHz repetition rate
• 100-mW average power

Xiton.jpgThe XVL-5HG laser developed by Xiton Photonics GmbH is a high-repetition-rate solid-state diode-pumped Q-switched laser with an emission wavelength of 213 nm. Its precise TEM00-mode laser beam is suitable for metrology and micromachining applications such as semiconductor and display repair.

Other target applications include rapid prototyping, wavelength-sensitive processes, stereo-lithography and semiconductor inspection. Because of the short wavelength, structure sizes below 1 μm are possible in direct-writing applications.

The laser delivers <7-ns short pulses with a beam quality of M2 <1.6. Average output power is specified at 100 mW, and >10 μJ of energy per pulse is emitted, with repetition rates between 0.1 and 30 kHz.

The unit is supplied with a sealed housing and a slot-mounted laser diode, simplifying pump replacement. Maintenance-free operation is facilitated by thermoelectrical heat management. The laser system operates in autoranging from 90 to 240 VAC and 47 to 63 Hz and is computer-controlled via an RS-232 interface. Various trigger control modes are available.


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