High Performance Spectrograph
Sep 2008Verity Instruments Inc.Request Info
CARROLLTON, Texas, Sept. 11, 2008 – Verity Instruments Inc. has released the SD1024FH super high performance spectrograph for semiconductor process control applications.
The spectrograph optimizes signal to noise performance via increased optical throughput, a data acquisition scheme, signal processing and system noise control. The 200 to 800 nm spectral range employs a 1024-element, scientific-grade thermoelectrically cooled CCD sensor designed specifically for challenging endpoint applications.
The sensor features UV response, stability against degradation under UV exposure, high sensitivity and a wide dynamic range. It is also supplied with the company’s SpectraView application software.
Applications include low exposed area contact, ion beam and photomask etch.
For more information, visit: www.verityinst.com
Verity Instruments Inc.
2901 Eisenhower Street
Carrollton, TX 75007
Phone: (972) 446-9990
Fax: (972) 446-9586