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Automated Microscope

EuroPhotonics
Nov 2008
HologenixRequest Info
 
The NGS automated microscope manufactured by Hologenix Inc. inspects bare or patterned wafers, microelectromechanical systems, transparent substrates and optical components for submicron-size defects. With its dimensional metrology capabilities, the operator just loads the part, chooses the recipe and presses the start button in the software. The system inspects the part, and the software creates a graphical map of the defect locations, saves the defect images, classifies the defects and creates a text report.


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