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MBE System

Veeco Instruments Inc.Request Info
 
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Veeco Instruments Inc. has added the ultraflexible GEN10 for materials research to its family of cluster tool molecular beam epitaxy (MBE) systems. The instrument can epitaxially deposit on single 1-, 2- and 3-in. wafers and incorporates the company’s automated cluster wafer transfer system. The platform allows for easy maintenance, and the automated and upgradable R&D system is capable of processing devices with incompatible materials.


Published: October 2008
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EuropeMaterialsProduct Previewtool molecular beam epitaxyVeeco Instruments Inc.Wafers

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