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Electrostatic Probe

Hiden Analytical Ltd.Request Info
 
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Espion, a Langmuir-style electrostatic probe manufactured by Hiden Analytical Inc., automatically reports the critical plasma characteristics of electron density and energy distribution, electron temperature, ion density, plasma potential and floating potential for plasma-based process analysis and control. Onboard software-controlled timing circuitry with acquisition trigger resolution of 62.5 ns provides high-resolution segmented temporal analyses through a plasma pulse at frequencies up to 3 MHz.


Published: October 2008
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electrostatic probeEuropeHiden Analytical Inc.plasma characteristicsProduct Preview

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