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EUV Spectrometer
Jan 2009
McPhersonRequest Info
CHELMSFORD, Mass., Jan. 12, 2009 – McPherson Inc. has released an x-ray and extreme ultraviolet (EUV) spectrometer, the 251MX, for wavelength dispersive spectral measurements from 0.6 to 20 nm (60 to 2000 eV.) The device provides corrected flat-field spectra with its selection of diffraction gratings. Data is acquired quickly and easily with direct-detection CCDs. The clean stainless steel chamber and vacuum-prepared internal components enable efficient pumping for high- or ultrahigh-vacuum (UHV) applications.

McPherson.jpgThe small footprint simplifies systems integration. The two available gratings, for 0.6 to 6 nm and 5 to 20 nm have square groove profiles. The laminar design helps reduce effects of high diffracted orders, and the corrected grating designs deliver high-resolution spectra.

The spectrometer advances laboratory soft x-ray and EUV spectral characterization and enables simultaneous spectral detection over a wide range. The dedicated optical geometry reduces calibration errors and increases the amount of data that can be collected in a given amount of time.

The stand-alone spectrograph is vacuum leak-tested and certified, and it is supplied with measured optical performance data in the wavelength region of interest. The turnkey integrated system includes pumps and a detector.

Applications include soft x-ray plasma diagnostics, analysis of high-order harmonic generated coherent EUV lasers, characterization of EUV sources for high-resolution imaging and fabrication of advanced semiconductor lithography processes.

For more information, visit:

McPherson Inc.
7A Stuart Road
Chelmsford MA 01824-4107
Phone: (978) 256-4512 (or 1-800-255-1055)
Fax: 978-250-8625





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The technology of generating and harnessing light and other forms of radiant energy whose quantum unit is the photon. The science includes light emission, transmission, deflection, amplification and detection by optical components and instruments, lasers and other light sources, fiber optics, electro-optical instrumentation, related hardware and electronics, and sophisticated systems. The range of applications of photonics extends from energy generation to detection to communications and...
A kind of spectrograph in which some form of detector, other than a photographic film, is used to measure the distribution of radiation in a particular wavelength region.  
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