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Piezoceramic actuator

EuroPhotonics
Mar 2009
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
PI.jpgPI (Physik Instrumente) LP has released the PICMA piezoceramic actuator based on stress reduction and encapsulation technologies. The actuator features high stiffness, temperature stability, low operating voltage and an operating temperature range from –40 to 150 °C. It is ultrahigh-vacuum-compatible to 10–9 hPa and has submillisecond response and subnanometer resolution. It also offers high resistance to humidity. Applications include lithography, nanopatterning, semiconductor test and measurement, nanomanipulation and life sciences, microscopy and motion control.


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EuropeindustrialMicroscopynanopatterningPI (Physik Instrumente) LPpiezoceramic actuatorProduct Previewsemiconductor test and measurement

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