Mar 2009PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) LP has released the PICMA piezoceramic actuator based on stress reduction and encapsulation technologies. The actuator features high stiffness, temperature stability, low operating voltage and an operating temperature range from –40 to 150 °C. It is ultrahigh-vacuum-compatible to 10–9 hPa and has submillisecond response and subnanometer resolution. It also offers high resistance to humidity. Applications include lithography, nanopatterning, semiconductor test and measurement, nanomanipulation and life sciences, microscopy and motion control.