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COLD CATHODE SYSTEM

Photonics Spectra
Mar 1997
Denton Vacuum LLCRequest Info
 
Denton Vacuum Inc. has introduced the CC-104 Cold Cathode Ion Source System for in situ substrate cleaning and pre-etching to maximize film adhesion in optical and ophthalmic applications. Comprising a cold cathode source and switching DC power supplies, it is suited for large chamber applications and can be incorporated into ion-assisted deposition processes to enhance and control the hardness, stability and refractive indices of evaporated films.


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