Jul 2009PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
The PI nano XY and PI nano XYZ piezo scanning stages launched by PI (Physik Instrumente) LP are optimized for integration into high-resolution microscopes. They feature a 20-mm profile, a large aperture, a piezoresistive integrated sensor and travel ranges of up to 200 × 200 × 200 μm with subnanometer closed-loop resolution. Typical linearity is ±0.1%, maximum payload is 500 g, typical repeatability is <5 nm, and operating temperature is from 20 to 30 °C. Long lifetime is ensured by the integrated ceramic-encapsulated PICMA piezo actuators. Applications include 3-D imaging, laser technology, mask/wafer positioning and interferometry.