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Vacuum Pump

EuroPhotonics
Oct 2009
Edwards Vacuum Inc.Request Info
 
Edwards.jpgEdwards has announced the iXL line of dry vacuum pumps for solar cell and flat panel display manufacturing. The iXL 500, the first member of the family, is a compact and efficient pump designed for load-lock applications where high gas throughputs and fast pump downtimes are crucial. It offers a pumping speed of 1800 m3/h, consuming 7 kW of power. Its low inertia booster shortens load-lock evacuation times with faster, more efficient pumping at higher inlet pressures. The company offers multipump systemization for multiple pumps on a single chamber. It features intelligent monitoring and is fully compatible with the company’s FabWorks network system.


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