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EXCIMER LASER

Photonics Spectra
Jun 1999
GAM Laser Inc.Request Info
 
The EX10 excimer laser from Gam Laser Inc. produces moderate pulse energies at high repetition rates in a compact, air-cooled package. Output energy varies from 10 to 30 mJ depending on excimer wavelength, and the pointing stability is better than 10 µrad/°C. It is available in 250- and 500-Hz models and achieves up to 10 W at 248 nm and 5 W at 193 nm. The EX10 has a metal and ceramic design, and the company says it can operate on XeCl for up to six months without gas exchange.


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