NT9080 Surface Metrology System

Veeco Instruments Inc.

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PLAINVIEW, N.Y., Feb. 2, 2010 – The NT9080 surface metrology system has been introduced by Veeco Instruments Inc. It uses white light interferometry to measure critical surface topography nondestructively, from nanometer-scale roughness through millimeter-scale steps, with subnanometer vertical resolution and production-level throughput. Push-button analysis provides instant feedback, and 3-D surface data is saved for subsequent characterization, without requiring a new scan of the sample or part. Used in research labs and in the precision machining, medical, printing, and solar cell manufacturing markets, the system can help increase yield and reduce production costs.

With a small footprint, the 3-D measurement microscope accommodates a wide variety of samples and feature sizes as small as half a micron. Running on the Vision software platform, it provides access to more than 200 distinct analyses, and more than 1000 critical parameters for measuring curvature, lay, bearing ratio, wear and corrosion.

It uses industry-standard ISO-certified analysis parameters to quantify engineered surface properties. No sample preparation is required. The operator places the sample under the measurement objective, focuses and initiates a measurement. Within seconds, the system produces a precision XYZ topographic map of the sample surface that is ready for detailed or pass/fail analysis.

The streamlined 3-D measurement system is suited to a wide variety of cost-sensitive research and industry applications, from solar cell texture mapping to the characterization of precision machined parts. Its robust architecture and small footprint serve production environments and small laboratories. Users can select an objective magnification from 1.5× to 50×, accommodating a wide variety of samples and feature sizes. Other standard features include proprietary and patent-pending, ultra-uniform dual-LED illumination.

Providing nondestructive 3-D surface profiling and analysis and an easy-to-use platform that delivers fast and efficient process monitoring, the system includes comprehensive and intuitive software that has preconfigured analysis routines. Customizable reporting ties results to definitive requirements to facilitate decision making.

Long-lifetime green and white LEDs provide the light source. Vertical measurement range is from 0.1 nm to 10 mm, with <0.12-nm resolution and 0.015-nm rms repeatability. Vertical scan speed is user-selectable up to 28 µm/s. Reflectivity is from <0.01 to 100%.

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Published: February 2010