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Immersion BARC

Photonics.com
Mar 2010
Brewer Science Inc.Request Info
 
ROLLA, Mo., March 11, 2010 – Brewer Science has launched the ARC29L coating, a state-of-the-art argon-fluoride immersion bottom antireflection coating (BARC) that provides broad photoresist compatibility and tuned optical properties for use as a top layer in a dual-layer BARC stack or as a single layer BARC on SiON.

The coating is based on the proprietary ARC29SR coating platform and provides low substrate reflectivities of less than 0.1% for film thicknesses of less than 40 nm. It is suitable for extending leading-edge immersion processes in both single-and double-patterning lithography schemes.

Its low thermal conductivity value delivers improved reflectivity control on absorbing substrates such as TiN and SiN.



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