Mar 2010Brewer Science Inc.Request Info
ROLLA, Mo., March 11, 2010 – Brewer Science has launched the ARC29L coating, a state-of-the-art argon-fluoride immersion bottom antireflection coating (BARC) that provides broad photoresist compatibility and tuned optical properties for use as a top layer in a dual-layer BARC stack or as a single layer BARC on SiON.
The coating is based on the proprietary ARC29SR coating platform and provides low substrate reflectivities of less than 0.1% for film thicknesses of less than 40 nm. It is suitable for extending leading-edge immersion processes in both single-and double-patterning lithography schemes.
Its low thermal conductivity value delivers improved reflectivity control on absorbing substrates such as TiN and SiN.