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IndyStar Excimer Laser

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Coherent Inc.
SANTA CLARA, Calif., April 7, 2010 — Coherent Inc. has added a new model to its IndyStar family of compact excimer lasers that offers a 2-kHz repetition rate for increased throughput. The fully Semi S2-certified laser incorporates several new output stabilization features for improved processing, making it suitable for use in semiconductor fabrication, testing, inspection and micromaterials processing facilities. It is offered with a choice of 193-nm (ArF) output where it delivers 8 W of stabilized power, or 248-nm (KrF) output with 12 W of stabilized power. The device uses an advanced electronics platform enabling...See full product

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