Showerhead Reactor
Aixtron SERequest Info
Aixtron AG is offering the close-coupled nitride showerhead Crius
metallorganic chemical vapor deposition system in 31 x 2-, 30 x 2-, 12 x 3-, 7 x
4-, 3 x 6- and 1 x 12-in. configurations. Used in LED epiwafer production, it is
equipped with a dynamic reactor height adjustment feature that facilitates growth
at elevated pressures. The reactor is fitted in an integrated circuit system design
and features six optical ports and a moly liner.
https://www.aixtron.com
/Buyers_Guide/Aixtron_SE/c484
Published: May 2010
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