May 2010AIXTRON SERequest Info
Aixtron AG is offering the close-coupled nitride showerhead Crius
metallorganic chemical vapor deposition system in 31 x 2-, 30 x 2-, 12 x 3-, 7 x
4-, 3 x 6- and 1 x 12-in. configurations. Used in LED epiwafer production, it is
equipped with a dynamic reactor height adjustment feature that facilitates growth
at elevated pressures. The reactor is fitted in an integrated circuit system design
and features six optical ports and a moly liner.