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Self-Heating Sensor Chips

May 2010
State of The Art Inc.Request Info
For thermal resistance measuring applications, State of the Art (SOTA) Inc. is offering a line of microwave self-heating sensor chips that use platinum on alumina and oxidized silicon. The heater/sensors are suitable for use in applications from microelectronics to biomedical engineering, including determination of thermal resistance of integrated circuit chips, variable optical attenuation of arrayed waveguide gratings, and thermal management in miniature chambers (minicell arrays). The TM365 model has two thermal sensors near the heater for stringent temperature control, and the TM364 single-sensor design provides moderate temperature control. Both operate at up to 250 °C. Self-heating is below 4 mW/°C. Custom designs can be developed based on customer drawings.


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An electromagnetic wave lying within the region of the frequency spectrum that is between about 1000 MHz (1 GHz) and 100,000 MHz (100 GHz). This is equivalent to the wavelength spectrum that is between one millimeter and one meter, and is also referred to as the infrared and short wave spectrum.
Heating that results from the dissipation of energy.
thermal resistance
In a laser, a measure of the device's ability to dissipate internally generated heat.
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