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Rotary Air-Bearing Stages

Photonics Showcase
May 2010
Aerotech Inc.Request Info
 
Aerotech’s ABRT rotary air-bearing stages provide 360° continuous travel with resolution to 0.027 arcsec. Velocity stability and error motion performance are exceptional. Payload capacity is up to 69 kg due to the outstanding radial/axial stiffness. ABRT is for optical inspection and fabrication, DVD mastering, wafer inspection, high-precision metrology applications, x-ray diffraction systems, MEMS/nanotechnology device fabrication and more.


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GLOSSARY
metrology
The science of measurement, particularly of lengths and angles.
x-ray diffraction
The bending of x-rays by the regular layers of molecules in a crystal acting like a very small diffraction grating. The diffraction pattern so obtained and recorded on film provides a means for analyzing the crystal structure.  
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