Rotary Air-Bearing Stages
May 2010Aerotech Inc.Request Info
Aerotech’s ABRT rotary air-bearing stages provide 360° continuous travel with resolution to 0.027 arcsec. Velocity stability and error motion performance are exceptional. Payload capacity is up to 69 kg due to the outstanding radial/axial stiffness. ABRT is for optical inspection and fabrication, DVD mastering, wafer inspection, high-precision metrology applications, x-ray diffraction systems, MEMS/nanotechnology device fabrication and more.