Jul 2010Aerotech Inc.Request Info
Aerotech’s ANT130-XY crossed-roller-bearing, direct-drive,
dual-axis stage offers 60 x 60-mm, 110 x 110-mm and 160 x 160-mm travels. Direct
drive has no hysteresis or backlash. ANT130-XY has 1-nm resolution, 50-nm repeatability,
250-nm accuracy and 3-nm in-position stability.