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SinguLYS Air-Bearing Stages
Jul 2010
Newport CorporationRequest Info
IRVINE, Calif., July 8, 2010 — Newport Corp. has announced the SinguLYS family of single-axis air bearing stages. The new stage and bridge configurations combine high performance with modularity, making them suitable for single-axis, split XY and gantry applications.

The SinguLYS S-370 stage is manufactured from silicon carbide (SiC) ceramic components. The body’s rigid and compact footprint with three-point mounting allows this stage to be used in tight spaces without the need for large, lapped mounting surfaces to maintain precise trajectory. The lightweight carriage features integrated pressure-vacuum air bearings which are guided by a precisely lapped SiC body. The stages are suitable for tasks with high duty cycles that require low angular deviation, tight velocity regulation and high cleanliness standards.

The SinguLYS B-1200 air-bearing bridge features a proprietary ceramic beam that is three times lighter than steel and offers triple the stiffness of granite. When used to replace a steel or granite-based design in an existing or next-generation tool, its properties can improve acceleration and decrease settling times, which increases throughput and accuracy with minimal system redesign. The lightweight and rigid pressure-vacuum air-bearing carriage accommodates 10-kg cantilevered payloads with 2.5-g acceleration and, unlike stages using mechanical bearings, minimizes contamination to the substrate below. Applications include Gen 8-11 flat panel display inspection, thin-film photovoltaic scribing and wafer processing.

Specially designed for frictionless operation, both the S and B series products are sturdy and reliable, and they require no maintenance or lubrication.


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