Dec 2006PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) LP has announced the D-510
family of PISeca capacitive displacement gauges for nanometrology applications.
They perform high-precision, noncontact measurements of geometric quantities representing
displacement, separation, position, length or other linear dimension against any
kind of electrically conductive target. The single-probe sensors achieve subnanometer
resolution and can measure ranges of up to 500 μm at a bandwidth up to 10 kHz.
A guard-ring electrode shields the sensor electrode from boundary effects, providing
a homogeneous electric field in the measurement zone and linearity of up to 0.1
percent. The systems can be operated in multichannel configurations.