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Metrology gauges

BioPhotonics
Dec 2006
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
PI (Physik Instrumente) LP has announced the D-510 family of PISeca capacitive displacement gauges for nanometrology applications. They perform high-precision, noncontact measurements of geometric quantities representing displacement, separation, position, length or other linear dimension against any kind of electrically conductive target. The single-probe sensors achieve subnanometer resolution and can measure ranges of up to 500 μm at a bandwidth up to 10 kHz. A guard-ring electrode shields the sensor electrode from boundary effects, providing a homogeneous electric field in the measurement zone and linearity of up to 0.1 percent. The systems can be operated in multichannel configurations.


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