Immersion BARC
Brewer Science Inc.Request Info
Brewer Science has launched the ARC29L coating, a state-of-the-art
argon-fluoride immersion bottom antireflection coating (BARC) that provides broad
photoresist compatibility and tuned optical properties for use as a top layer in
a dual-layer BARC stack or as a single layer BARC on SiON. The coating is based
on the proprietary ARC29SR coating platform and provides low substrate reflectivities
of less than 0.1% for film thicknesses of less than 40 nm. It is suitable for extending
leading-edge immersion processes in both single- and double-patterning lithography
schemes. Its low thermal conductivity value delivers improved reflectivity control
on absorbing substrates such as TiN and SiN.
https://www.brewerscience.com
/Buyers_Guide/Brewer_Science_Inc/c1974
Published: July 2010
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