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Piezoelectric stages

BioPhotonics
Sep 2006
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
 
The P-628.2CD X-Y closed-loop piezoelectric stages from PI (Physik Instrumente) LP are suitable for use by nanometrology/precision microscopy instrument designers to probe large areas. The stages provide a travel range of 1000 μm using a friction-free, stiff flexure system that offers rapid response and guiding accuracy with trajectory precision in the low-nanometer range. The stages are vacuum-compatible, have digital control for up to 99.98% position accuracy and achieve a resolution of less than 1 nm. They come with ceramic-encapsulated piezo drives for humidity protection as well as capacitive direct-metrology sensors for faster servo response.


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