Sep 2006PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
The P-628.2CD X-Y closed-loop piezoelectric stages
from PI (Physik Instrumente) LP are suitable for use by nanometrology/precision
microscopy instrument designers to probe large areas. The stages provide a travel
range of 1000 μm using a friction-free, stiff flexure system that offers rapid
response and guiding accuracy with trajectory precision in the low-nanometer range.
The stages are vacuum-compatible, have digital control for up to 99.98% position
accuracy and achieve a resolution of less than 1 nm. They come with ceramic-encapsulated
piezo drives for humidity protection as well as capacitive direct-metrology sensors
for faster servo response.