Aug 2010PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
The P-563.3CD PIMars stage from PI (Physik Instrumente) L.P. is
a piezo scanning and nanomanipulation system. Enabling precision motion control
with subnanometer resolution and 340 x 340 x 340-μm travel in the X-Y-Z axes,
it is suitable for micromanufacturing, biotechnology, nanotechnology, scanning microscopy,
and semiconductor and data-storage test equipment applications. The instrument incorporates
high-force solid-state piezo actuator drives, frictionless flexure guiding systems,
absolute measuring capacitive position sensors and a 66 x 66-mm clear aperture.
Ultrahigh-vacuum versions up to 10–9 hPa are available as well as Invar, Super-Invar
and titanium models.