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Piezo Stage

Aug 2010
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
The P-563.3CD PIMars stage from PI (Physik Instrumente) L.P. is a piezo scanning and nanomanipulation system. Enabling precision motion control with subnanometer resolution and 340 x 340 x 340-μm travel in the X-Y-Z axes, it is suitable for micromanufacturing, biotechnology, nanotechnology, scanning microscopy, and semiconductor and data-storage test equipment applications. The instrument incorporates high-force solid-state piezo actuator drives, frictionless flexure guiding systems, absolute measuring capacitive position sensors and a 66 x 66-mm clear aperture. Ultrahigh-vacuum versions up to 10–9 hPa are available as well as Invar, Super-Invar and titanium models.


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axesBiophotonicsbiotechnologydata storageEuropeflexure guiding systemindustrialInvarmicromanufacturingMicroscopyMotion ControlnanonanomanipulationnanotechnologyopticsP-563.3CDPhysik InstrumentePIpiezo actuator drivepiezo scanningPimars stageProduct Previewscanning microscopysemiconductorSensors & DetectorsstagessubnanometerSuper-InvarTest & Measurementtitaniumvacuum

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