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Solardryer RDS 2100/RDS 3000
Aug 2010
Rehm Thermal Systems GmbHRequest Info
BLAUBEUREN-SEISSEN, Germany, Aug. 18, 2010 — Rehm Thermal Systems GmbH has launched the Solardryer RDS 2100 and RDS 3000 for metallization lines. The drying process consists of a combination of five infrared zones and one central convection zone, offering temperature profiling that can be adjusted for precision and flexibility. These horizontal throughput systems guarantee a safe transport through the oven via either mesh belt or with pin chain up to three lanes.

In the mesh belt systems, the conveyor of the heating zone can be separated from that of the cooling zone so that no latent heat is carried into the cooling area, offering a higher cooling gradient and a shorter oven. And at belt speeds of up to 6m/min, the RDS series provides high throughput of up to 5700 wafers/h.

The new systems are also available with the proprietary condensate residue management system, a process that controls the buildup of unwanted paste solvent and vehicle residue in the process chamber and extends the maintenance intervals. The entire process chamber of the RDS series drying systems is designed to be readily accessible for maintenance purposes. The oven opens from the front and comprises sheets that can be easily removed for cleaning, reducing maintenance time and effort.

The Rehm RFS fast firing furnace, the RFS-D combination drying and firing system, and the model RDS series dryers feature low energy consumption and a compact footprint that optimizes factory space while minimizing expense.

The fast fire systems enable new levels of metallization process performance with features including single-, dual- and triple-lane handling of wafers, an integrated residue management system that maintains a clean process chamber and extends maintenance intervals, and profile control and process monitoring, including reference products for baseline profiling.

The proprietary Visu2 software includes traceability tools, remote diagnostics and an extensive product library.

Gas management improves thermal transfer efficiency without using supplemental heaters, reducing energy consumption and increasing system insulation.


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condensate residue managementconvectiondual-laneenergyEuropegreen photonicshorizontal throughputinfraredmesh beltmetallization linesphotovoltaicspin chainProductsPVRDS 2100RDS 3000RehmRFS fast firing furnaceRFS-D drying/firing systemsingle-laneSolardryertemperature profilingtriple-laneVisu2 softwareWafers

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