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DEEP-UV MICROSCOPE

Photonics Spectra
Aug 1999
Carl Zeiss Microscopy LLCRequest Info
 
laDEEPThe Axiotron UV from Carl Zeiss Jena GmbH is a deep-UV microscope designed for quality control and defect classification of structures smaller than 2 µm. It comes with dry objectives, Epi-Ultrafluar 120x/0.95 for 248 nm and Epi-APO 80x/0.95 for 365 nm for use in a production environment, and with glycerin immersion objectives, including Ultrafluar 100x/1.3 for failure analysis. Magnifications greater than 25,000x can be achieved by using a cooled, high-resolution UV-enhanced CCD camera.


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