Large-Area UV Machining Solutions
Sep 2010Coherent Inc.Request Info
VarioLas mask imaging or line beam systems are based on the well-known
COMPexPro excimer laser series. These lasers are affordable tools for high-quality
large-area UV laser machining and surface annealing. Superior optics and ruggedized
mechanics are key to the VarioLas platform, which is available at 193-, 248- and
308-nm laser wavelengths.