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Air-Bearing Stages

Photonics Spectra
Oct 2010
Newport CorporationRequest Info
Newport Corp. has announced the SinguLYS family of single-axis air-bearing stages. The new stage and bridge configurations combine high performance with modularity, making them suitable for single-axis, split X-Y and gantry applications. The SinguLYS S-370 stage is manufactured from silicon carbide ceramic components. The body’s rigid and compact footprint with three-point mounting allows this stage to be used in tight spaces without the need for large, lapped mounting surfaces to maintain a precise trajectory. The SinguLYS B-1200 air-bearing bridge features a proprietary ceramic beam that is three times lighter than steel and offers triple the stiffness of granite. When used to replace a steel or granite-based design in an existing or next-generation tool, its properties can improve acceleration and decrease settling times, which increases throughput and accuracy with minimal system redesign. Specially designed for frictionless operation, both the S and B series products are sturdy and reliable, and they require no maintenance or lubrication.


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air bearing stageceramicFootprintgantryGranitemountingNew ProductsNewportNewport CorporationSiCsilicon carbidesingle-axisSinguLYSSinguLYS S-370 stagestagesteelTest & MeasurementX-Y

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