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Direct-Drive Rotary Stages

Photonics Showcase
Jan 2011
Aerotech Inc.Request Info
 
Aerotech’s ANT95-R and ANT130-R series direct-drive rotary stages feature 0.005-arcsec in-position stability and 0.01-arcsec resolution. They are designed for compatibility and easy integration with ANT series linear stages and provide accuracy, stability, compact size and high dynamic performance required for nanomanufacturing and inspection applications.


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