Direct-Drive Rotary Stages
Jan 2011Aerotech Inc.Request Info
Aerotech’s ANT95-R and ANT130-R series direct-drive rotary
stages feature 0.005-arcsec in-position stability and 0.01-arcsec resolution. They
are designed for compatibility and easy integration with ANT series linear stages
and provide accuracy, stability, compact size and high dynamic performance required
for nanomanufacturing and inspection applications.