Sep 1999Verity Instruments Inc.Request Info
Verity Instruments Inc. has introduced its SD1024 spectrograph for low-exposed-area endpoint detection, plasma diagnostics and advanced process control applications. It provides continuous monitoring of plasma emissions in the 200- to 800-nm range. A 2-D CCD array enables simultaneous monitoring of from one to six fiber optic inputs. The compact optical design provides 1.7-nm resolution with sharp imaging over the entire sensitive area of the detector without using folding mirrors.