Automated Load-Lock System
Feb 2011Buhler Inc., Business Area Leybold OpticsRequest Info
Leybold Optics USA has added a fully automated load-lock system
to its portfolio of evaporation tools for the liftoff process. The liftoff system
incorporates an electron beam source with a multipocket hearth for metal evaporation.
The process and chamber geometry are optimized for evaporation of metals such as
titanium, platinum and gold. The plasma source can be used for precleaning of substrates
as well as for ion-assisted deposition and can be operated with pure argon or oxygen
as well as with mixes thereof. The measurement of the film thickness is done through
a quartz monitor with shuttered single quartzes. The oil-free vacuum is generated
with a cryo pump and a dry fore pump stand.