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Automated Load-Lock System

Photonics Spectra
Feb 2011
Buhler Inc., Business Area Leybold OpticsRequest Info
Leybold Optics USA has added a fully automated load-lock system to its portfolio of evaporation tools for the liftoff process. The liftoff system incorporates an electron beam source with a multipocket hearth for metal evaporation. The process and chamber geometry are optimized for evaporation of metals such as titanium, platinum and gold. The plasma source can be used for precleaning of substrates as well as for ion-assisted deposition and can be operated with pure argon or oxygen as well as with mixes thereof. The measurement of the film thickness is done through a quartz monitor with shuttered single quartzes. The oil-free vacuum is generated with a cryo pump and a dry fore pump stand.


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argonAUautomatedcassette elevatorcleanroomcryo pumpdry fore pump standelectron beam sourceevaporationgoldgray roomhandling chamberIADion-assisted depositionLeybold Opticslift-offload lock systemloading stationmetalmultipocket hearthNew Productsoil-free vacuumopticsoxygenplasmaplatinumPLCpre-cleaningprogrammable logic controllerPTquartz monitorTItilting segmentstitanium

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