Piezo Focusing Systems
Feb 2011PI (Physik Instrumente) L.P., Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) L.P. has introduced the PIFOC piezo objective
scanner system packages for microscopy applications. Offering subnanometer resolution,
the devices are designed to improve results in fast focusing, lens positioning and
deconvolution/3-D imaging. The units consist of software, closed-loop piezomechanic
objective positioners and custom-tuned compact digital servocontroller/ driver units.
Travel ranges offered are 100, 250 or 400 μm. Available position feedback sensors
include the low-cost piezoresistive and the higher-precision capacitive types. Applications
include fast autofocus systems, microscopy, 3-D imaging, screening, surface analysis
and wafer inspection.