MEMS Scanning Micromirrors
Apr 2011Lemoptix SA (acquired by Intel Corp.)Request Info
Lemoptix SA’s silicon-based, magnetically actuated microelectromechanical systems (MEMS) micromirror technologies can replace traditional galvanometer and rotating mirrors. Responding to industry requests to reduce size and power consumption and to increase performance of micromirror devices, the company has developed a bottom-up approach by using semiconductorlike equipment to build micromirrors with actuation based on magnetic and heat-dissipating principles instead of gearings. The laser scanning micromirrors can be used in optical applications such as 3-D measurement, endoscopy, confocal microscopy, optical spectrometers, medical imaging and projectors. Features include a large optical scanning angle above 40° in static (step by step, DC) mirrors, and above 70° in resonant mirrors; a patented and integrated mirror position sensor; and ultraprecise MEMS driving and sensing electronics.