Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
share
Email Facebook Twitter Google+ LinkedIn

NESSY II: For Coatings in EUV Applications

Photonics Showcase
May 2011
Buhler Inc., Business Area Leybold OpticsRequest Info
 
Leybold Optics has developed the second generation of a unique sputtering system for coating at 13.4 nm – the EUV range. The coating system can feature up to six sputtering targets to coat MO and Si layers. The layer systems consist of more than 100 layers with very tight thickness specifications that require high precision, high stability and excellent reproducibility. The machine also features a load lock. The tool is used for applications in EUV lithography.


REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
Photonics Buyers' Guide
Looking for Sputtering Targets? There are 26 companies listed in the Photonics Buyers' Guide.
Browse Cameras & Imaging, Lasers, Optical Components, Test & Measurement, and more.
coatingsEuroPhotonics Product SpotlightEUVFeatured ProductsindustrialLeybold Opticslighographyload lockMONESSY IIopticsPhotonics ShowcaseProduct ShowcaseSisix targetssputtering system

Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2017 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
X
Are you interested in this product?
If you'd like Buhler Inc., Business Area Leybold Optics to reach out to you with more information about this product, please supply your email and they will contact you.

Email Address:
Stop showing me this for the remainder of my visit