Laser µFAB Workstation

MKS/Newport

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Newport Corp. has introduced the Laser µFAB, a tabletop laser microfabrication workstation optimized for research applications. It is designed for use in both additive and subtractive processes, including 3-D microfabrication by two-photon polymerization (TPP), laser ablation and surface structuring of various materials, volumetric writing of waveguides and microfluidics, and nanosurgery and microdissection.

Specific research applications using TPP in custom or commercial photoresists include photonics, microelectronics and microelectromechanical systems. Relevant industrial materials that can be used in ablation and surface structuring applications include metals, polymers, semiconductors, glasses, ceramics and biological targets. Waveguides and microfluidics can be volumetrically written in glasses and polymers. Nanosurgery and microdissection can be done in vivo for subcellular investigations of model organisms.

The Laser µFAB can be configured for use with femtosecond laser oscillators, amplifiers, optoelectronic pulse amplifiers and other types of lasers in the visible to near-infrared range. Submicron spot sizes are achieved at the sample with high-numerical-aperture objectives. Simple lenses can be used in less critical applications, for example, where 10- to 20-μm spot sizes are acceptable. Computer-controlled variable attenuation is integrated with the workstation to prevent over- or underexposure at the sample.

The standard Laser µFAB includes high-precision stages covering 100-mm X and Y, and 4.8-mm Z, with a resolution of 50 nm. This allows for continuous large-area patterning without the need for stitching. The top plate includes a holder with features for slides, coverslips, wafers or large samples.

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Published: June 2011