Sapphire Wafer Carriers
Jun 2011Meller Optics Inc.Request Info
Custom-fabricated sapphire wafer carriers that are uniform, parallel,
durable and impervious to solvents and etchants are available from Meller Optics
Inc. They feature ±1.2-μm thickness and part-to-part uniformity, with
parallelism to 10 arcsec, depending upon size, and they exhibit Moh 9 hardness that
is second only to diamond. Suited for thinning semiconductor materials such as GaAs,
they are available plain and can be perforated with custom patterns for hold-down
or delamination. Able to withstand repeated use, they are chip-, chemical- and scratch-resistant.
Custom-fabricated in 2- to 6-in.-diameter sizes as thin as 0.018 in., they can be
supplied with flats, laser markings and other special characteristics. The carriers
are priced according to size and configuration. Typically, there is a four- to six-week
delivery period, according to the company.