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Miniature Hexapod

Jul 2011
PI (Physik Instrumente) LP, Air Bearings and Piezo Precision MotionRequest Info
PI (Physik Instrumente) L.P. has released a miniature hexapod. The six-axis precision parallel positioner is available in standard and vacuum-compatible versions. The M-811 measures 130 mm in diameter and 115 mm in height and can handle loads to 5 kg and position them in all six degrees of freedom with submicrometer precision. It offers actuator resolution of 0.04 μm, repeatability of ±0.5 μm and velocity to 10 mm/s. The vacuum hexapod is bundled with software and a digital controller with high-speed Ethernet connectivity. The hexapod is easy to program and command because all positions are given in Cartesian coordinates. Applications include medical engineering, x-ray microscopy and photonics alignment.


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AmericasBiophotonicsBreakthroughProductsHexapodM-811MassachusettsMicroscopyminiature hexapodparallel positionerPI (Physik InstrumenteTest & Measurementvacuum hexapod

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