Close

Search

Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
share
Email Facebook Twitter Google+ LinkedIn

Rotary Air-Bearing Stages

Photonics Spectra
Aug 2011
Aerotech Inc.Request Info
 
The ABRS high-precision rotary air-bearing stages from Aerotech Inc. have a slotless zero-cogging motor and a low-profile design to reduce effective working height and to minimize stack-up errors. Designed for high-precision angular positioning and velocity stability, the stages’ high stiffness and load capacity minimize axial, radial and tilt error motion to satisfy applications requiring good planar performance. The brushless motor is inherently torque-ripple-free to maximize positioning accuracy. The stages meet the motion control requirements of semiconductor wafer inspection, high-precision metrology, x-ray diffraction, optical inspection and fabrication, and microelectromechanical systems/nanotechnology device fabrication. A direct-coupled rotary encoder achieves resolution of <0.03 arcsec and accuracy of ±1 arcsec or less when used with the unit’s feedback multipliers and controls.


REQUEST INFO ABOUT THIS PRODUCT

* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address:
Address 2:
City:
State/Province:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
ABRS seriesAerotechair-bearingAmericasangular positioningbrushless motorclear apertureMEMSmetrologymicroelectromechanical systems fabricationnanotechnology device fabricationNew Productsoptical fabricationoptical inspectionPennsylvaniarotaryrotary encodersemiconductor wafer inspectionslotless motorstagesTest & Measurementtorque-ripple-freevelocity stabilityx-ray diffractionzero cogging

Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2017 Photonics Media
x Subscribe to Photonics Spectra magazine - FREE!
X
Are you interested in this product?
If you'd like Aerotech Inc. to reach out to you with more information about this product, please supply your email and they will contact you.

Email Address:
Stop showing me this for the remainder of my visit