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MATERIALS INSPECTION

Photonics Spectra
Oct 1999
McPhersonRequest Info
 
tINSPECTMcPherson Inc. has developed the VUVaS series dual-beam scanning vacuum spectrophotometer, which measures lithography optics down to 115 nm. The test station can inspect and analyze materials and determine 193- and 157-nm laser source damage and test absorbance, transmittance and reflectance. A variable sample/detector allows the user to examine irregular or diffractive samples. The system offers interactive computer control of scans and data acquisition. Standard units accept five 1-in.-diameter samples or three 2 x 2-in. samples.


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