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Spectrographs

Photonics Spectra
Sep 2011
Verity Instruments Inc.Request Info
 
Verity Instruments Inc. has released its next-generation spectrographs, the SD1024G series, direct replacements for the SD1024F. The instruments feature reduced system noise, providing improved end-pointing capability in moderate-to-low-light applications. They are designed for demanding semiconductor process control applications such as low exposed area contact etch, ion beam etch and photomask etch. They can be used within a spectral reflectometer for film thickness or depth measurement. Their 200- to 800-nm spectral range optical system uses a thermoelectrically cooled CCD detector with good ultraviolet response, high sensitivity, low noise and a wide dynamic range. Also released is the SD1024GH, a high-performance version that incorporates high-efficiency optics for good light throughput (higher signal) over the entire spectral range of the instrument. SpectraView application software is supplied.


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Americasdepth measurementdigital input/outputEthernetfilm thicknession beam etchlow exposed area contact etchNew Productsopticsphotomask etchRoHS-compliantRS-232SD1024FSD1024GSD1024GHsemiconductor process controlSensors & Detectorsspectral reflectometerSpectraView softwarespectrographsTest & MeasurementTexasthermoelectrically cooled CCD detectorultravioletVerity Instruments

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