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Automated TEM

Photonics Spectra
Oct 2011
JEOL USA Inc.Request Info
A 200-kV transmission electron microscope (TEM) manufactured by JEOL USA Inc. performs high-throughput nanoanalysis for process and quality control of mass-produced semiconductor and materials samples. The multifunction JEM-2800 features high-resolution imaging in TEM, scanning TEM and scanning electron modes; ultrasensitive elemental mapping with a large-angle energy-dispersive spectrometer; electron energy loss spectroscopy for chemical analysis; critical dimension analysis; tomography; and in situ observation of samples. The microscope functions without the use of the traditional fluorescent screen on the electron column. It speeds specimen observation through automatic functions including adjustment of focus, astigmatism, contrast, brightness, height and crystal zone axis alignment. Switching between analysis modes is seamless, and quick data collection shortens turnaround time between samples.


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A lens aberration that results in the tangential and sagittal image planes being separated axially.  
The apparent difference in brightness between light and dark areas of an image. For a light target against a dark background, contrast is computed as follows: where Lt is the luminance of the target and Lb is the luminance of the background.
1. The focal point. 2. To adjust the eyepiece or objective of a telescope so that the image is clearly seen by the observer. 3. To adjust the camera lens, plate, or film holder so that the image is rendered distinct. 4. To move an entire microscope body tube relative to a specimen to obtain the sharpest possible image.
Technique that defocuses activity from surrounding planes by means of the relative motions at the point of interest.
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