Vacuum-Compatible LTA-V6 Series Actuators
MKS/NewportRequest Info
The LTA-V6 vacuum-compatible actuators are designed to 10&—6 hPa vacuum, feature nonrotating tips for long-term position stability and are rated at 10,000 h MTBF. Compatible with other vacuum-compatible manual stages, LTA actuators provide submicron minimum incremental motion (MIM) and unidirectional repeatability.
http://www.newport.com
/Buyers_Guide/MKS_Newport/c10218
Published: November 2011
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