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Zurich Instruments AG - Boost Your Optics 1-24 LB

DynamYX Datum 450 and 450GT

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MKS/Newport
IRVINE, Calif., July 10, 2012 — Newport Corp. has introduced a line of air-bearing stages designed for the 450-mm semiconductor wafer initiative. The DynamYX Datum 450 and 450GT are based on the company’s DynamYX 300 series wafer processing and inspection platforms and are suited to handle the larger travel ranges, payloads and increased throughput requirements of next-generation 450-mm tools. They deliver high-resolution dynamic positioning of a wafer chuck or similar substrate in two orthogonal translation axes from a single-plane carriage. For added flexibility, a vertical Z-axis with tip/tilt function...See full product

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