Search Menu
Photonics Media Photonics Buyers' Guide Photonics EDU Photonics Spectra BioPhotonics EuroPhotonics Industrial Photonics Photonics Showcase Photonics ProdSpec Photonics Handbook
More News
Email Facebook Twitter Google+ LinkedIn

MetaPULSE FP Metrology System
Aug 2012
Rudolph Technologies Inc.Request Info
FLANDERS, N.J., Aug. 8, 2012 — Rudolph Technologies Inc.’s MetaPULSE FP thin-film metrology system is used by manufacturers of flat panel displays for handheld mobile devices, such as tablets, electronic book e-readers and smartphones. The system uses proprietary PULSE (picosecond ultrasonic laser sonar) technology to measure the critical thickness of metal layers deposited during the manufacturing process.

The system enables measurement on actual product structures without contacting or destroying the device.

PULSE technology’s ability to provide noncontact, nondestructive, on-product measurements of single- and multilayered opaque thin films accommodates front-end-of-line and back-end-of-line processes in semiconductor manufacturing.  

The new FP system combines a MetaPULSE measurement head with customized glass substrate handling to extend measurement capability to the large substrates used to make flat panels. The system is being employed on 790 × 930-mm substrates, which are used to make displays for e-readers, tablets, phones and other mobile devices.

Most large flat panel display manufacturers use an active matrix technology that involves fabricating the thin-film transistors (TFTs) in either amorphous or polycrystalline silicon applied to the rear of the glass, which is similar to those used during semiconductor manufacturing. A typical TFT process includes deposition of a series of gate metals as well as deposition of Ti and/or Al source and data lines. PULSE technology provides nonontact, nondestructive measurements of these metals, individually or in a multilayered film stack, with gauge capability.

Process control of these layers is directly related to panel performance and process yield. With the MetaPULSE FP system, measurement and substrate handling functions are separated.


* Message:
(requirements, questions for supplier)
Your contact information
* First Name:
* Last Name:
* Email Address:
* Company:
Address 2:
Postal Code:
* Country:
Phone #:
Fax #:

Register or login to auto-populate this form:
Login Register
* Required
Photonics Buyers' Guide
Looking for Substrates? There are 45 companies listed in the Photonics Buyers' Guide.
Browse Cameras & Imaging, Lasers, Optical Components, Test & Measurement, and more.
Americasamorphous siliconback-end-of-line processesConsumerelectronic book e-readersflat panel displaysfront-end-of-line processesglass substrate handlinghandheld mobile devicesindustrialMetaPULSE FPmetrologymultilayer opaque thin filmsNew Jerseynoncontact measurementnondestructive measurementPhotonic Component Mfg. Equip.Photonics Component Mfg. Equip.picosecond ultrasonic laser sonar technologypolycrystalline siliconProductsPULSE technologyRudolph Technologiessingle-layer opaque thin filmssmartphonestabletsTest & MeasurementTFTthin-film metrologythin-film transistors

Terms & Conditions Privacy Policy About Us Contact Us
back to top

Facebook Twitter Instagram LinkedIn YouTube RSS
©2018 Photonics Media
x We deliver – right to your inbox. Subscribe FREE to our newsletters.
Are you interested in this product?
If you'd like Rudolph Technologies Inc. to reach out to you with more information about this product, please supply your email and they will contact you.

Email Address:
Stop showing me this for the remainder of my visit