FMSxxHA Linear Stages for Metrology
Oct 2012Newport CorporationRequest Info
IRVINE, Calif., Oct. 3, 2012 — FMSxxHA linear stages have been launched by Newport Corp. for surface metrology applications.
They are available in 100-, 200- and 300-mm models. They feature smooth motion, low noise, high straightness and flatness.
With all-steel construction, the stages combine high stiffness and thermal stability for robust, precise and repeatable measurements. The crossed roller bearings have an anti-creep feature to provide smooth and straight motion, reducing measurement noise and variability.
The precision-ground steel ball screw is designed for high-speed motion, enabling higher throughput. The stages are driven by a stepper motor with a linear encoder that provides on-axis accuracy down to 1 μm and submicron bidirectional repeatability.
They are compatible with the company’s eight-axis XPS universal controller. Applications include surface profilometry and tribology.