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FMSxxHA Linear Stages for Metrology
Oct 2012
Newport CorporationRequest Info
IRVINE, Calif., Oct. 3, 2012 — FMSxxHA linear stages have been launched by Newport Corp. for surface metrology applications.

They are available in 100-, 200- and 300-mm models. They feature smooth motion, low noise, high straightness and flatness.

With all-steel construction, the stages combine high stiffness and thermal stability for robust, precise and repeatable measurements. The crossed roller bearings have an anti-creep feature to provide smooth and straight motion, reducing measurement noise and variability.

The precision-ground steel ball screw is designed for high-speed motion, enabling higher throughput. The stages are driven by a stepper motor with a linear encoder that provides on-axis accuracy down to 1 μm and submicron bidirectional repeatability.

They are compatible with the company’s eight-axis XPS universal controller. Applications include surface profilometry and tribology.


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The science of measurement, particularly of lengths and angles.
stepper motor
A positioning drive that rotates a fraction of a 360° turn when the motor coils are activated, resulting in linear or rotary motion. They are generally one of two types, either variable reluctance or permanent magnet; the characteristics are much the same. Also called stepping motors.
The science of interfacing surfaces in moving contact, which includes areas such as friction, lubrication and wear.
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